Nanoanalysis

Fraunhofer IZFP Dresden (IZFP-D)

Through Silicon Vias

On this topic:

Competences in Nanoanalysis

High-Resolution electron and ion microscopy

  • Transmission Electron Microscopy
  • Scanning Electron Microscopy (SEM)
  • Focused Ion Beam technique (FIB)

High-Resolution X-ray Techniques

  • Nano Transmission X-Ray Microscopy (TXM)
  • Nano X-Ray Tomography (XCT)

Highly-Resolved Mechanical Properties

  • Nanoindentation
  • Atomic Force (Acoustic) Microscopy (AFAM / AFM)